研峰科技 Infinity Scientific

Tris(dimethylamino)silane 3DMAS 三(二甲氨基)硅烷

规格: 99.9%(99.9999%-Si)

CAS: 15112-89-7

产品编号: H35891

MDL: MFCD00048006

品牌: INFI

ALD前驱体

ALD简介

原子层沉积技术(Atomic Layer Deposition，简称ALD)是一种在纳米尺度上进行薄膜沉积的先进技术。通过将物质以单原子形式一层一层的镀在基底表面，拥有优异的三维共形性、大面积成膜的均匀性和精确控制膜厚等特点。

ALD应用

ALD在能源领域应用

2009年，Miyaska课题组将钙钛矿材料MAPbI3用作燃料敏化太阳能电池的光伏活性层，正式开启了钙钛矿太阳能电池的新纪元。ALD凭借其均匀成膜性、精准控制厚度和保形性等多种优势，在光伏领域中发挥着重要作用。除此之外，ALD技术还可用于锂电池薄膜涂层，提高电池性能。

ALD在泛半导体应用

随着泛半导体行业的发展，对微型化和集成化要求越来越高，尺寸缩小至亚微米和纳米量级，ALD作为一种高精度薄膜沉积技术，可用于晶体管栅极电介质层(高K材料)、金属栅电极、有机发光显示器涂层、铜互联扩散阻挡层、DRAM电介质层、微流体和MEMS涂层、传感器等众多领域。

ALD在光学领域应用

由于 ALD 具有的三维共形沉积和大面积均匀性特点，已成功应用于高质量光学薄膜、增透膜、折射率可调的光学薄膜、波状多层膜，改善了光子晶体的光学性质和可控性，增加了光子晶体在未来光学器件中的应用潜力。

公司致力于ALD高纯半导体薄膜前驱体材料的自主研发和生产，成立以来，已陆续向多家半导体客户提供了百余种前驱体新材料，包括高纯硅基前驱体系列、High-k前驱体系列产品，部分新品已被客户用于5nm以下制程薄膜设备。我们致力为客户提供优质的产品并建立互信、长久的合作关系，产品具有自主知识产权且原材料国产化，打破国外垄断的同时保证供应链的安全。研峰科技愿与国内芯片、高端显示、光伏新能源等高端客户一起携手，解决高端半导体材料的把脖子难题，早日实现进口替代。

Chemical Name	Tris(Dimethylamino)Silane
Synonym	(Me2N)3SiH N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane Tris(dimethylamino)silane (Me2N)3SiH 三(二甲胺基)硅烷 N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane Tris(dimethylamido)silane (Me2N)3SiH N,N,N',N',N'', N''-Hexamethylsilanetriamine N,N,N',N',N'',N''-Hexamethylsilanetriamine TDMAS Tris(dimethylamido)silane
EC Number	239-165-0
Chemical Name Translation	三(二甲胺基)硅烷
Beilstein Registry Number	1901643
PubChem Substance ID	329758267
MDL Number	MFCD00048006
CAS Number	15112-89-7

GHS Symbol

TYPE OF TEST            : LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE       : Administration onto the skin
SPECIES OBSERVED        : Rodent - rabbit
DOSE/DURATION           : 477 mg/kg
TOXIC EFFECTS :
   Lungs, Thorax, or Respiration - chronic pulmonary edema
   Liver - other changes
   Nutritional and Gross Metabolic - weight loss or decreased weight gain
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

TYPE OF TEST            : LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE       : Oral
SPECIES OBSERVED        : Rodent - rat
DOSE/DURATION           : 594 mg/kg
TOXIC EFFECTS :
   Lungs, Thorax, or Respiration - dyspnea
   Gastrointestinal - other changes
   Nutritional and Gross Metabolic - weight loss or decreased weight gain
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

TYPE OF TEST            : LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE       : Inhalation
SPECIES OBSERVED        : Rodent - rat
DOSE/DURATION           : 38 ppm/6H
TOXIC EFFECTS :
   Sense Organs and Special Senses (Eye) - lacrimation
   Behavioral - ataxia
   Gastrointestinal - changes in structure or function of salivary glands
REFERENCE :
   TIHEEC Toxicology and Industrial Health.  (Princeton Scientific Pub. Co.,
   POB 2155, Princeton, NJ 08540)  V.1-    1985-  Volume(issue)/page/year:
   5,45,1989

WGK Germany	3
Hazard statements
H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤 H330 Fatal if inhaled 吸入致命 H311 Toxic in contact with skin 皮肤接触中毒 H261 In contact with water releases flammable gas 与水接触时释放可燃气体。 H225 Highly flammable liquid and vapour 高度易燃液体和蒸气 H302 Harmful if swallowed 吞食有害
Personal Protective Equipment	Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
RTECS	VV5800000
Precautionary statements
P402+P404 P231+P232 P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。 P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。 P370+P378 P403+P235 P260 Do not breathe dust/fume/gas/mist/vapours/spray. 不要吸入粉尘/烟/气体/烟雾/蒸汽/喷雾。 P284 Wear respiratory protection.? 佩戴呼吸保护装置。 P422 Store contents under… 存储目录在…之下。
Signal word	Danger
Hazard Codes	F,C
Safety Statements
S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 发生事故时或感觉不适时，立即求医（可能时出示标签）； S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后，立即用大量水冲洗并征求医生意见； S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护； S43 In case of fire use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add -?Never use water) 着火时使用（指明具体的消防器材种类，如果用水增加危险，注明“禁止用水” S16 Keep away from sources of ignition - No smoking 远离火源，禁止吸烟；
Risk Statements
R11 Highly flammable 非常易燃 R20 Harmful by inhalation 吸入有害 R29 Contact with water liberates toxic gas. 遇水释放出有毒气体 R34 Causes burns 会导致灼伤 R52/53 R15 Contact with water liberates extremely flammable gases 遇水会释放出极端易燃的气体
Restrict	危险品

15112-89-7 H35891 Tris(dimethylamino)silane 3DMAS
三(二甲氨基)硅烷

化学属性

Melting Point	-90 °C (lit.)
Mol. Formula	[(CH3)2N]3SiH
Mol. Weight	161
Density	0.84
Flash Point	77°F
Appearance	colorless to light yellow liq.
Boiling Point	145-148°C (4°C/16mm)
Stability	air sensitive, moisture sensitive
Danger-Level	-
pH	-:-
Redox	-

*以上化合物性质及应用等信息仅供参考