ALD简介
原子层沉积技术(Atomic Layer Deposition,简称ALD)是一种在纳米尺度上进行薄膜沉积的先进技术。通过将物质以单原子形式一层一层的镀在基底表面,拥有优异的三维共形性、大面积成膜的均匀性和精确控制膜厚等特点。

ALD应用

ALD在能源领域应用
2009年,Miyaska课题组将钙钛矿材料MAPbI3用作燃料敏化太阳能电池的光伏活性层,正式开启了钙钛矿太阳能电池的新纪元。ALD凭借其均匀成膜性、精准控制厚度和保形性等多种优势,在光伏领域中发挥着重要作用。除此之外,ALD技术还可用于锂电池薄膜涂层,提高电池性能。


ALD在泛半导体应用
随着泛半导体行业的发展,对微型化和集成化要求越来越高,尺寸缩小至亚微米和纳米量级,ALD作为一种高精度薄膜沉积技术,可用于晶体管栅极电介质层(高K材料)、金属栅电极、有机发光显示器涂层、铜互联扩散阻挡层、DRAM电介质层、微流体和MEMS涂层、传感器等众多领域。

ALD在光学领域应用
由于 ALD 具有的三维共形沉积和大面积均匀性特点,已成功应用于高质量光学薄膜、增透膜、折射率可调的光学薄膜、波状多层膜,改善了光子晶体的光学性质和可控性,增加了光子晶体在未来光学器件中的应用潜力。

公司致力于ALD高纯半导体薄膜前驱体材料的自主研发和生产,成立以来,已陆续向多家半导体客户提供了百余种前驱体新材料,包括高纯硅基前驱体系列、High-k前驱体系列产品,部分新品已被客户用于5nm以下制程薄膜设备。我们致力为客户提供优质的产品并建立互信、长久的合作关系,产品具有自主知识产权且原材料国产化,打破国外垄断的同时保证供应链的安全。研峰科技愿与国内芯片、高端显示、光伏新能源等高端客户一起携手,解决高端半导体材料的把脖子难题,早日实现进口替代。
Chemical Name | Tetrakis(dimethylamino)tin(IV) TDMASn |
Synonym |
Tin(IV) dimethylamide
tetrakis-(dimethylamino-)-stannane
Tetrakis-(dimethylamino)-zinn
Tetrakis(dimethylamino)stannane
四(二甲氨基)锡
Tetrakis(dimethylamino)tin |
MDL Number | MFCD00014860 |
CAS Number | 1066-77-9 |
Chemical Name Translation | 四(二甲氨基)锡 |
InChIKey | WHXTVQNIFGXMSB-UHFFFAOYSA-N |
PubChem Substance ID | 16684220 |
LabNetwork Molecule ID | LN01253175 |
InChI | InChI=1S/4C2H6N.Sn/c4*1-3-2;/h4*1-2H3;/q4*-1;+4 |
GHS Symbol
WGK Germany | 3 |
Precautionary statements | |
- P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
- P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或医生/医师。
- P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
- P305+P351+P338
|
Hazard statements | |
- H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤
- H332 Harmful if inhaled 吸入有害
- H225 Highly flammable liquid and vapour 高度易燃液体和蒸气
- H312 Harmful in contact with skin 皮肤接触有害
- H302 Harmful if swallowed 吞食有害
- H302+H312+H332
|
Hazard Codes |
F,C
F;C |
Personal Protective Equipment |
Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US) |
Signal word |
Danger |
Safety Statements | |
- S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后,立即用大量水冲洗并征求医生意见;
- S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护;
- S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 发生事故时或感觉不适时,立即求医(可能时出示标签);
- S16 Keep away from sources of ignition - No smoking 远离火源,禁止吸烟;
|
Risk Statements | |
- R11 Highly flammable 非常易燃
- R20/21/22 Harmful by inhalation, in contact with skin and if swallowed 吸入、皮肤接触和不慎吞咽有害
- R34 Causes burns 会导致灼伤
|
UN Number |
2924 |
Restrict |
危险品 |
{uni_hamburg} Short: II/25D
Title: Structure Data of Free Polyatomic Molecules: Molecules Containing Five or More Carbon Atoms
Author: Graner, G.; Hirota, E.; Iijima, T.; Kuchitsu, K.; Ramsay, D.A.; Vogt, J.; Vogt, N.
Editor: Kuchitsu, K.
Source: Landolt-Börnstein, New Series
Volume: II/25D
Year: 2003
Keyword: Free Polyatomic Molecules; Carbon Atoms; Molecules
ISBN: 3-540-42860-7
ISBN: 978-3-540-42860-2
Internet Resource: DOI:10.1007/b75952
RefComment: VIII, 569 pages. Hardcover
RefComment: Written for scientists and researchers in the fields of chemistry and physics
Abstract: This fourth subvolume presents data on the geometric parameters (internuclear distances, bond angles, dihedral angles of internal rotation etc) of free polyatomic molecules including free radicals and molecular ions. The survey on structure data consists of four subvolumes, each containing the geometric parameters determined in the gas phase either by an analysis of the rotational constants (and sometimes the vibrational constants) obtained from microwave, infrared, Raman, electronic and photoelectron spectroscopy or by an analysis of electron diffraction intensities. Most of the structures listed in the tables are for molecules in the electronic ground state, but structures for electronically excited states have also been included as far as they are available. In this fourth subvolume, the structure of molecules containing five to sixty carbon atoms is listed.
{uni_hamburg} Short: III/38A
Title: Refractive Indices of Inorganic, Organometallic, and Organononmetallic Liquids and Binary Liquid Mixtures
Author: Wohlfarth, Ch.; Wohlfarth, B.
Editor: Lechner, M.D.
Source: Landolt-Börnstein, New Series
Volume: III/38A
Year: 1996
Keyword: organicmetallic compounds; inorganic compounds; refractive index; liquids; mixtures
ISBN: 3-540-60539-8
ISBN: 978-3-540-60539-3
Internet Resource: DOI:10.1007/b55612
RefComment: VII, 400 pages, Hardcover
Abstract: Volume III/38 Optical Constants provides critical