Tetrakis(dimethylamino)titanium TDMAT 四(二甲氨基)钛(IV)

规格: 99.5+%(99.9999%-Ti)
CAS: 3275-24-9
产品编号: H89647
MDL: MFCD00014861
品牌: INFI

ALD简介

   原子层沉积技术(Atomic Layer Deposition,简称ALD)是一种在纳米尺度上进行薄膜沉积的先进技术。通过将物质以单原子形式一层一层的镀在基底表面,拥有优异的三维共形性、大面积成膜的均匀性和精确控制膜厚等特点。

ALD应用

ALD在能源领域应用

2009年,Miyaska课题组将钙钛矿材料MAPbI3用作燃料敏化太阳能电池的光伏活性层,正式开启了钙钛矿太阳能电池的新纪元。ALD凭借其均匀成膜性、精准控制厚度和保形性等多种优势,在光伏领域中发挥着重要作用。除此之外,ALD技术还可用于锂电池薄膜涂层,提高电池性能

ALD在泛半导体应用

随着泛半导体行业的发展,对微型化和集成化要求越来越高,尺寸缩小至亚微米和纳米量级,ALD作为一种高精度薄膜沉积技术,可用于晶体管栅极电介质层(高K材料)、金属栅电极、有机发光显示器涂层、铜互联扩散阻挡层、DRAM电介质层、微流体和MEMS涂层、传感器等众多领域。

ALD在光学领域应用

由于 ALD 具有的三维共形沉积和大面积均匀性特点,已成功应用于高质量光学薄膜、增透膜、折射率可调的光学薄膜、波状多层膜,改善了光子晶体的光学性质和可控性,增加了光子晶体在未来光学器件中的应用潜力。

 公司致力于ALD高纯半导体薄膜前驱体材料的自主研发和生产,成立以来,已陆续向多家半导体客户提供了百余种前驱体新材料,包括高纯硅基前驱体系列、High-k前驱体系列产品,部分新品已被客户用于5nm以下制程薄膜设备。我们致力为客户提供优质的产品并建立互信、长久的合作关系,产品具有自主知识产权且原材料国产化,打破国外垄断的同时保证供应链的安全。研峰科技愿与国内芯片、高端显示、光伏新能源等高端客户一起携手,解决高端半导体材料的把脖子难题,早日实现进口替代。




Chemical NameTetrakis(Dimethylamino)Titanium TDMAT
Synonym Tetrakis(dimethylamino)titanium, 96% , C 44.5%, H 10.8%, Ti 26.99-29.23% TETRAKIS(DIMETHYLAMINO)TITANIUM TETRAKIS(DIMETHYLAMINO)TITANIUM, 99.999% Titantetrakis(dimethylammonium) Titanium, tetrakis(dimethylamino)- 二甲基氨基钛(IV) {uni_hambur Tetrakis(dimethylamino)titanium, 99.99% n-methyl-methanamintitanium(4+)salt Tetrakis(dimethylamino)titanium,99%TDMAT Titanium tetrakis(dimethylamide); Tetrakis(dimethylamino)titanium TDMAT 四(二甲基氨基)钛(IV) TETRAKIS(DIMETHYLAMIDO)TITANIUM(IV), FOR titanium dimethylamide Tetrakis(dimethylamino)titanium(IV) {JN TITANIUM(IV) DIMETHYLAMIDE 四次二甲基銨基鈦 tetrakis(dimethylamino)titanium 四(二甲基氨基)钛(IV) Titanium(IV) dimethylamide, 99.95%
PubChem Substance ID123185
EC Number221-904-3
Reaxys-RN3618377
Beilstein Registry Number4(4)128
Chemical Name Translation四(二甲胺基)钛
InChIKeyMNWRORMXBIWXCI-UHFFFAOYSA-N
LabNetwork Molecule IDLN01253381
CAS Number3275-24-9
MDL NumberMFCD00014861
InChIInChI=1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
GHS Symbol
WGK Germany3
Hazard Codes F,C,Xi F,C
Hazard statements
  • H225 Highly flammable liquid and vapour 高度易燃液体和蒸气
  • H260 In contact with water releases flammable gases which may ignite spontaneously 与水接触时释放可燃气体,可自燃。
  • H302 Harmful if swallowed 吞食有害
  • H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤
  • H331 Toxic if inhaled 吸入中毒
    Personal Protective Equipment Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
    Precautionary statements
    • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
    • P223 Keep away from any possible contact with water, because of violent reaction and possible flash fire. 远离任何与水接触的可能,因为会剧烈反应可能产生闪火。
    • P231+P232
    • P233 Keep container tightly closed. ?保持容器密闭。
    • P240 Ground/bond container and receiving equipment. 与地面接触/连接集装箱和接受设备。
    • P241 Use explosion-proof electrical/ventilating/lighting/…/equipment. 使用防爆电气/通风/照明/ .../设备。
    • P242 Use only non-sparking tools. 只能使用无火花工具。
    • P243 Take precautionary measures against static discharge. 采取预防措施,防止静电放电。
    • P260 Do not breathe dust/fume/gas/mist/vapours/spray. 不要吸入粉尘/烟/气体/烟雾/蒸汽/喷雾。
    • P261 Avoid breathing dust/fume/gas/mist/vapours/spray. 避免吸入粉尘/烟/气体/烟雾/蒸汽/喷雾。
    • P264 Wash hands thoroughly after handling. 处理后要彻底洗净双手。
    • P270 Do not eat, drink or smoke when using this product. 使用本产品时不要吃东西,喝水或吸烟。
    • P271 Use only outdoors or in a well-ventilated area.? 只能在室外或通风良好的地方使用。
    • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
    • P301+P312
    • P301+P330+P331
    • P303+P361+P353
    • P304+P340
    • P305+P351+P338
    • P305+P351+P338+P310
    • P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或医生/医师。
    • P311 Call a POISON CENTER or doctor/physician. 呼叫解毒中心或医生/医师。
    • P321 Specific treatment (see … on this label). 具体治疗(见本标签上的)。
    • P330 Rinse mouth. 漱口
    • P335+P334
    • P363 Wash contaminated clothing before reuse. 被污染的衣服洗净后方可重新使用。
    • P370+P378
    • P402+P404
    • P403+P233
    • P403+P235
    • P405 Store locked up. 上锁保管。
    • P422 Store contents under… 存储目录在…之下。
    • P501 Dispose of contents/container to..… 处理内容物/容器.....
      Signal word
      UN Number UN3129 3398 3399
      Safety Statements
      • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护;
      • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后,立即用大量水冲洗并征求医生意见;
      • S16 Keep away from sources of ignition - No smoking 远离火源,禁止吸烟;
      • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 发生事故时或感觉不适时,立即求医(可能时出示标签);
      • S43 In case of fire use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add -?Never use water) 着火时使用(指明具体的消防器材种类,如果用水增加危险,注明“禁止用水”
        Risk Statements
        • R34 Causes burns 会导致灼伤
        • R14 Reacts violently with water 遇水会猛烈反应
        • R11 Highly flammable 非常易燃
          Storage condition Moisture Sensitive Flammables area
          Packing GroupII
          Hazard Class4.3/3
          Restrict 危险品
        • {SA}
        • 1. J. Appl. Phys. 102 , 083521/1, (2007)
        • {uni_hamburg} Short: II/25D
        • Title: Structure Data of Free Polyatomic Molecules: Molecules Containing Five or More Carbon Atoms
        • Author: Graner, G.; Hirota, E.; Iijima, T.; Kuchitsu, K.; Ramsay, D.A.; Vogt, J.; Vogt, N.
        • Editor: Kuchitsu, K.
        • Source: Landolt-Börnstein, New Series
        • Volume: II/25D
        • Year: 2003
        • Keyword: Free Polyatomic Molecules; Carbon Atoms; Molecules
        • ISBN: 3-540-42860-7
        • ISBN: 978-3-540-42860-2
        • Internet Resource: DOI:10.1007/b75952
        • RefComment: VIII, 569 pages. Hardcover
        • RefComment: Written for scientists and researchers in the fields of chemistry and physics
        • Abstract: This fourth subvolume presents data on the geometric parameters (internuclear distances, bond angles, dihedral angles of internal rotation etc) of free polyatomic molecules including free radicals and molecular ions. The survey on structure data consists of four subvolumes, each containing the geometric parameters determined in the gas phase either by an analysis of the rotational constants (and sometimes the vibrational constants) obtained from microwave, infrared, Raman, electronic and photoelectron spectroscopy or by an analysis of electron diffraction intensities. Most of the structures listed in the tables are for molecules in the electronic ground state, but structures for electronically excited states have also been included as far as they are available. In this fourth subvolume, the structure of molecules containing five to sixty carbon atoms is listed.
        • {uni_hamburg} Short: EINECS
        • Title: EINECS (European Inventory of Existing Commercial Chemical Substances)
        • Source: Official Journal of the European Communities
        • Volume: C 146 A (15.06.1990)
        • Page: 1
        • Year: 1990
        • Internet Resource: http://ecb.jrc.ec.europa.eu/esis/index.php?PGM=ein
        • Publish_Date: 1990/06/15
        • 3275-24-9 H89647 Tetrakis(dimethylamino)titanium TDMAT
四(二甲氨基)钛(IV)

          化学属性

          TSCAYes
          Melting Point<4°C
          Mol. FormulaTi[N(CH3)2]4
          Appearance yellow to orange liq.
          Mol. Weight224
          Stabilitymoisture sensitive
          Density0.96
          Flash Point-22°F
          Boiling Point50°C/0.5 mm
          Danger-Level-
          pH-:-
          Redox-

          *以上化合物性质及应用等信息仅供参考